Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.) ( en Inventor Takashi Miyamatsu Hiroaki Nemoto Yong Wang Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.) Withdrawn Application number EP05741390A Other languages German ( de) Google Patents Liquid for immersion exposure and immersion exposure methodĭownload PDF Info Publication number EP1748469A1 EP1748469A1 EP05741390A EP05741390A EP1748469A1 EP 1748469 A1 EP1748469 A1 EP 1748469A1 EP 05741390 A EP05741390 A EP 05741390A EP 05741390 A EP05741390 A EP 05741390A EP 1748469 A1 EP1748469 A1 EP 1748469A1 Authority EP European Patent Office Prior art keywords group carbon atoms immersion exposure liquid hydrocarbon group Prior art date Legal status (The legal status is an assumption and is not a legal conclusion. Google Patents EP1748469A1 - Liquid for immersion exposure and immersion exposure method EP1748469A1 - Liquid for immersion exposure and immersion exposure method
